Inductively Coupled Plasma Mass Spectrometry (ICP-MS) is a novel inorganic element and isotope analysis technique that can rapidly and simultaneously detect almost all elements on the periodic table. ICP-MS technology surpasses the sum of traditional inorganic analysis techniques such as inductively coupled plasma atomic absorption spectroscopy (ICPAES), graphite furnace atomic absorption spectroscopy (GFAAS), and mercury cold atomic absorption spectroscopy (CVAAS) in terms of analytical capabilities, and is known as the most exciting development in contemporary analytical technology.

The application areas of Agilent ICP-MS technology include:
Environmental sample analysis, including analysis of tap water, surface water, groundwater, seawater, as well as various soils, waste materials, etc;
Semiconductor material analysis
Analysis of samples such as glass, ceramics, and mining and metallurgy;
Geological research;
Clinical research on biological food and medicine;
● Nuclear material analysis
Petrochemical sample analysis;
Forensic applications and research;
Recently, the combination of separation technology for element valence and form analysis in fields such as environmental toxicology and life sciences has become a focus of ICP-MS technology applications.
ICP-MS analysis characteristics:
● Can quickly and simultaneously detect almost all elements on the periodic table
The lowest detection limit (as low as ppq level)
● Analyze the optimal benefit/cost ratio
The widest linear dynamic range - can directly detect concentrations from ppq to hundreds of ppm
The spectral lines are the simplest, with minimal interference and good accuracy and precision
Low sample size (ul to ml) and fast analysis speed (1-3 minutes/sample) are required
● Flexible and diverse detection modes
Analysis of Ultra trace Pollutants in Commonly Used Materials in the Semiconductor Industry:
Solid: Si; GaAA single crystal slice; Furnace materials such as quartz and silicon carbide; High purity metal electrodes, etc
Liquid: Ultra pure water; HF;HNO3; HCI; H2SO4; H2O2; Ammonia water, etc
Gas: SiH4; TE0S; NF3; N2, etc
Agilent ICP-MS can directly analyze organic samples:
The high-performance and high-power shielded moment cold plasma technology of Agilent ICP-MS has been used to determine ppt level trace pollutants in a series of organic samples.
For some of these samples, other methods cannot obtain satisfactory results, and high-power shielding moment cold plasma technology is the only analytical method.
Strong alkaline cleaning agents such as tetramethylammonium hydroxide (TMAH)
Common organic solvents - toluene, xylene, IPA, etc
High substrate samples - highly volatile cleaning agents such as photoresist, liquid crystal, BPSG, PSG - acetone, methanol, etc.